ECE 5037: Solid State Electronics and Photonics Laboratory

Ohio State University

Introduction to Introduction to laboratory techniques for semiconductor device fabrication including photolithography, oxidation, diffusion, chemical processes, reactive ion etching, and metallization; fabrication and measurements of visible light emitting diodes (LED) and GaN High Electron Mobility Transistor (HEMT). Prereq: 3030 or MatScEn 3271; or Grad standing in Engineering, Biological Sciences, or Math and Physical Sciences.

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