MATE 189: Microelectromechanical Systems and Microfluidics

San Jose State University

Hands-on design, fabrication, and testing of microelectromechanical systems (MEMS) and microfluidic devices. Fabrication processes including oxidation, photolithography, etching, and vapor film deposition. Design problems for transducer components such as cantilever beam actuators, membrane deflection sensors, and microchannels. Introduction to multiphysics simulation of microscale devices. Lecture 2 hours, Lab 3 hours Prerequisite(s): MATE 153 or MATE 25 or TECH 25 (with a grade of C- or better).