EML 5290: Introduction to MEMS and Micromachining
University of Central Florida
Introduction of Micro-Electro-Mechanical-Systems (MEMS) and micromachining (microfabrication) methods. Etching and etching mask. Basics of silicon macromachining processing. Fundamentals of bulk micromachining. Thin film formation and surface micromachining. Microplating and LIGA process. Nonlithographic micromachining process including laser. May be repeated for credit.
Average GPA: 3.55
Grade distribution records: 30 students across 4 terms.
Grade distribution
| Grade | Students | Percent |
|---|---|---|
| A | 10 | 33.3% |
| A- | 8 | 26.7% |
| B+ | 5 | 16.7% |
| B | 2 | 6.7% |
| B- | 4 | 13.3% |
| U | 1 | 3.3% |
Based on 30 student grade records across 4 terms and 1 professor.
Instructors
- Hyoung Jin Cho 30 students, Average GPA 3.55