ME 270: INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS

University of California, Riverside

4 Units, Lecture, 4 hours. Prerequisite(s): ME 110, ME 114, or equivalents, for MSE 238 online section; enrollment in the Online Master-in-Science in Engineering program. An introduction to the design and fabrication of microelectromechanical systems (MEMS). Topics include micromachining processes; material properties; transduction; applications in mechanical, thermal, optical, radiation, and biological sensors and actuators; microfluidic devices; Bio-MEMS and applications; packaging and reliability concepts; and metrology techniques for MEMS. Cross-listed with MSE 238.

Average GPA: 3.98

Grade distribution records: 80 students across 5 terms.

Grade distribution

GradeStudentsPercent
A+7087.5%
A56.3%
A-56.3%

Based on 80 student grade records across 5 terms and 2 professors.

Instructors

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