ECE 141B: MEMS: SEMICOND PROC
University of California, Santa Barbara
Lectures and laboratory on semiconductor-based processing for MEMS. Descrip tion of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacito r-actuators.
Average GPA: 3.60
Grade distribution records: 10 students across 2 terms.
Grade distribution
| Grade | Students | Percent |
|---|---|---|
| A+ | 2 | 20.0% |
| A | 3 | 30.0% |
| A- | 2 | 20.0% |
| B+ | 2 | 20.0% |
| C | 1 | 10.0% |
Based on 10 student grade records across 2 terms and 1 professor.
Instructors
- Pennathur S 10 students, Average GPA 3.60